SRI Foundry Services
Microfabrication services for your process development, device prototyping, and production needs
SRI Foundry Services – work with our experts to reduce risk and time to market. Take a tour!
Deep Expertise & Experience
Decades of experience leading advanced microfabrication projects, including design support and custom process development for government agencies, startups, universities, and Fortune 500 corporations worldwide.
Custom Process Development
Develop processes, fabricate test devices, and prove your idea, enabling transition to scale up.
Flexible Partnering Arrangements
We handle projects from single film deposition, to full device development, to prototype commercialization, with flexible IP terms customized to your needs.
What We Offer
We specialize in customized, small batch, expertise-supported services and process development engagements.
Deep Expertise & Experience
Decades of experience leading advanced microfabrication projects, including design support and custom process development, for government agencies, startups, and Fortune 500 corporations.
Custom Process Development
Develop processes, fabricate small batch test devices, and prove your idea, enabling transition to scale up.
Reduced Risk & Time to Market
We’ll help you identify the key technical challenges and get to proof points and demonstrators quickly, to facilitate efficient transition to production foundries.
Our Services
We specialize in customized, expertise-supported services and process development engagements.
Film Deposition
We offer comprehensive thin film deposition services. Whether you require simple single-layer films, complex epitaxy, or process development on your chosen substrate to determine the optimal materials and methods for your device, we can support you at every stage.
Materials:
Dielectric
Metal
Solder
Semiconductor
Processes:
Physical Vapor Deposition (PVD; Sputtering)
E-Beam Evaporation
Thermal Evaporation
Low Pressure Chemical Vapor Deposition (LPCVD)
Plasma-Enhanced Chemical Vapor Deposition (PECVD)
Metal Organic Chemical Vapor Deposition (MOCVD)
Atomic Layer Deposition (ALD)
Screen Print
Electroplating
Etching
We offer both wet chemical etching and dry etching, and have capabilities on etching a wide variety of materials, including semiconductors like Silicon (Si), Gallium Arsenide (GaAs), Indium Phosphide (InP), and Gallium Nitride (GaN) and their associated alloys.
Materials:
Dielectric
Metal
Semiconductor
Organics
Processes:
Reactive Ion Etching (RIE)
Deep Reactive Ion Etching (DRIE)
Inductively-Coupled Plasma (ICP)
Chemically-Assisted Ion Beam (CAIBE)
Xenon Difluoride (XeF2)
Wet Chemical
Patterning
We offer a wide range of techniques and materials for patterning. Our capabilities include photolithography and shadow masking. We work with both positive and negative photoresist, image reversal, lift-off processes, and dry film resist with thicknesses exceeding 100 microns.
Materials:
Photoresist
SU-8
Benzocyclobutene (BCB)
Polyimide
Processes:
Photolithography
Ebeam Lithography
Dry Film Processing
Lift-off Processing
Characterization
We offer a comprehensive suite of techniques and tools for materials characterization. Our expert team skillfully employs these methods to ensure that the materials, processes, and devices we develop for you deliver high performance, reproducibility, and fabrication yield.
Materials:
Thin Films
Laser Diodes
Photodetectors
Heterostructures
Distributed Bragg Reflector (DBR)
Processes:
Scanning Electron Microscopy (SEM)
High Resolution X-Ray Diffraction (HRD)
Photoluminescence (PL)
Spectophotometry
Thin Film Process Monitoring
Backend Microfabrication
We offer backend capabilities important for Micro-Electro-Mechanical-Systems (MEMS), photonics, and microelectronics. Our expertise includes thinning substrates such as Silicon (Si), Gallium Arsenide (GaAs), Indium Phosphide (InP), Gallium Nitride (GaN), and sapphire. We can cleave compound semiconductors to form mirror facets, and we can polish edges of cut substrates such as sapphire to form waveguide input/output optical couplers for photonic integrated circuits. We have capabilities for die attach, including flip-chip ball grid array interconnect, and we have capabilities to pick and place micron-size chiplets such as micro-LEDs.
We perform add-on back-end-of-line fabrication on Complementary Metal Oxide Semiconductor (CMOS) foundry wafers. Processes include redistribution lines, interlayer dielectrics, opening buried bond pads on wafer-bonded structures, selective area optical coating, and excimer laser shallow dopant activation.
Custom Process Development
We provide end-to-end custom microfabrication process development services, tailored to meet the unique requirements of advanced device concepts. Our team works closely with clients to translate ideas into robust, reproducible process flows, combining expertise in thin film deposition, photolithography, etching, and packaging. Whether the goal is to demonstrate proof-of-concept devices, refine integration steps, or scale toward pilot production, we design and optimize each process module with precision and repeatability in mind.
Success Stories
See example devices we have developed to help our partners transition new products to market.
View AllApplication Areas
We can provide services to assist in a wide variety of application areas.
Optoelectronics & Photonics
MEMS
Quantum SYSTEMS
Advanced Packaging
Biomicrosystems
Simple 3-Step Process
Submit a RequestSubmit your request.
Just fill out our simple request form letting us know what you are trying to accomplish and the type of services you might be interested in. We’ll get you connected to an SRI Foundry expert.
We confirm details and answer your questions.
After receiving your request, an SRI Foundry expert will reach out to you directly to discuss your request, answer questions, and provide recommendations on how we can best satisfy your requirements.
We generate a quote to help you get your project going.
Once we have worked with you to develop an appropriate Statement of Work that meets your needs and budget, we will send you a quote for your review.
Our Partners
Our partners trust us to deliver quality results.
